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Photolithograhic Chemical PK-DEX / SFR / CRD Series
Photolithographic Chemical Contents
【Developer】 PK-DEX Series
Has high resolution and broad developing margin characteristics.
Excels in resist dispersibility and prevention of re-coagulation, and prevents resist from re-adherence, thus lengthening the life of the solution.
A low foaming type causing no foam-related problems.
PK-DEX4000 series can be used for aluminium and copper.
| Products Name | Type | Features |
|---|---|---|
| PK-DEX1010CX | Na2CO3 | For negative color resist. Have a long life. Good for fine patterning. |
| PK-DEX1510 | KOH | For negative color resist. Good for fine patterning at low concentration. |
| PK-DEX4000 | Organic Alkali |
Development performance is good, for negative and positive photoresist. Can be used for aluminum and copper. |
| PK-DEX4020 | Organic Alkali | For lift-off photoresist. Can be used for aluminum and copper. |
| PK-DEX4050 | Organic Alkali | Development performance is good, for negative and positive resists.
Can be used for aluminum, copper, and aluminum nitride. |
| PK-DEX4310 | Organic Alkali | Development performance is good, for negative and positive resists.
Can be used for aluminum and copper. Water dilution type. |
Resist development example.
Influence for aluminum coating substrate.
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PK-DEX4000/Uncorroded
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TMAH/Corroded
【Stripper】PK-SFR / CRD Series
Has a mild odor, contributing to an improved working environment.
Excels in resist dispersibility and prevention of re-coagulation, and prevents resists from re-adherence.
PK-SFR8130 is the stripper for dry film resists.
| Products Name | Type | Features |
|---|---|---|
| PK-SFR8110 | Organic alkali | Standard type. Can be used for aluminum and copper. Nonflammable liquid. |
| PK-SFR8120 | Organic neutral | Provide a good work environment by neutrality. Can be used for aluminum and copper. Nonflammable liquid. |
| PK-SFR8130 | Organic alkali | For dry film resists. Can be used for aluminum and copper. Water dilution type. Nonflammable liquid. |
| PK-SFR8200 | Organic Alkali | Stripper for fine peeling of dry film resists.
Has powerful stripping performance. Water dilution type. Nonflammable liquid. |
| PK-SFR8410 | Organic Alkali | Can be used for thick film negative resists. |
| PK-CRD620 | Inorganic alkali | Has powerful stripping performance.
Ideal for positive resists. |
Resist stripping example
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Before resist stripping
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After resist stripping
